Precision Piezo Stages, Micrometer Motion

Advanced Performance Products for Laser Scientists & Engineers

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Travel RangeResolution Description
Manufacturer

10 µm 0.02 nm Stackable for XY motion; Closed loop control; Titanium or invar construction. Mad City Labs

12 µm 0.02 nm Direct-drive actuation enables fast response times and higher-throughput processes; Long device lifetime. Aerotech

25 µm 0.1 nm Material Aluminium; Maximum Load 1kg; Max Force(Push/Pull) 100N/20N. nPoint

32 µm 0.03 nm High-precision, frictionless flexure guidance; Open-loop and vacuum versions; Closed-loop travels from 10 µm to 40 µm. Aerotech

34 µm 0.7 nm Motions in X, Z, XY, XZ and XYZ are available; Max load 5kg; Open/closed loop. COREMORROW

40 µm 0.7 nm The P13 series piezo nanopositioning stage is a two-dimensional XY or three dimensional XYZ piezo stage. COREMORROW

10 µm 0.01 nm High speed, multi-axis; XY and XYZ configurations; Z-axis step response time down to 2ms. Mad City Labs

8 µm 0.1 nm P63 is based on an ultra-fast piezo drive scanning stage design and is equipped with a strain sensing position sensor. COREMORROW

25 µm 0.05 nm Center aperture: 0.25 diameter; Low pro le: 0.8"; Closed loop control; High resolution Z-axis alignment. Mad City Labs

10 µm 0.01 nm Single axis (Z) motion; Step response less than 1 millisecond; Scans up to 500 Hz. Mad City Labs

20 µm 0.5 nm P77 series piezo nanopositioning scanners are designed with an excellent flexible hinge guide mechanism. COREMORROW

38 µm 0.07 nm 3D nano positioning stage; compact design; flexure hinge design without mechanical play. Piezosystem Jena

70 µm 0.07 nm High speed, direct drive; Stackable for XY or XYZ motion; Silicon control technology. Piezo Concept

9 µm 0.02 nm 3D nanopositioning stage compact design; flexure hinge design without mechanical play. Piezosystem Jena

12 µm 0.05 nm Highest linearity and stability with capacitive sensors; Direct- drive design for fastest response. PI

40 µm 0.08 nm high mechanical stability because of high stiffness; accurate parallel motion by parallelogram design. Piezosystem Jena

Precision Piezo Stages, Micrometer Motion

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