Z Piezo Stage,10µm Travel Range, 0.01nm Resolution

High speed Z piezo stage from Mad City Labs. The travel range of the nanopositioning is 10µm with closed loop resolution of 0.01 nm. The noise floor for the piezo stage is less than 10 pA which is achieved by careful attention to the design and resonant frequency greater than 7.5kHz. Compact design Z stage for Metrology and Interferometry applications. For high speed scanning applications the Mad City Labs stage can scan up to 500 Hz. The Z piezo stage has a maximum load of 0.1 kg and a stiffness of 12 N/µm. The nanopositioning stage can be combined with XY stages to form a highly compact and precise XYZ stage.