Motorized XY Stages, XYZ and Z Stages, Short Travel

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Travel Range

Description

10 mm 5 nm Precision-ground ball screw for high performance; Submicron closed-loop positioning. Aerotech
1 mm — Easily configured with ARA1000 for multi-axis applications; High stiffness; High accuracy; High load-carrying capability. Aerotech
20 mm 50 nm 20 mm travel range; Speed of 5 mm/s; 500 N load capacity. Newport
2 mm — Easily configured with ARA1000 for multi-axis applications; High load-carrying capability; High accuracy. Aerotech
3 mm 2 nm Nanometer performance with 3 mm vertical travel; High resolution (1 nm), repeatability (100 nm), and accuracy (200 nm). Aerotech
5 mm 1 nm Low profile for space-conscious applications; Noncontact direct-drive; High repeatability; Aerotech
5 mm 2 nm Nanometer performance with 5 mm vertical travel; High dynamic performance; In-position stability of <2 nm. Aerotech
5 mm 5 nm High-load lift stage with aperture; 5 mm travel; custom designs for alternate travels available; Aerotech
5 mm 20 nm Integrated linear encoder provides 0.02µm position feedback for highly repeatable and accurate motion. Newport
6 mm 200 nm Integral or removable motor; 6, 13, and 25 mm travel models; Long-life linear guide bearing system. Aerotech
13 mm 200 nm Submicron closed-loop positioning; 6, 13, and 25 mm travel models; Low-cost, high-performance stage. Aerotech
20 mm 2000 nm Travel length 15mm, 20mm; Table size 40×40mm, 60×60mm; Guide Crossed roller guide. Suruga Seiki
10 mm 1000 nm Table Size 70mm×70mm; Guide Mechanism Cross-Roller Guide; Lead Mechanism Ball Screw, Lead 1.0mm. Kohzu
15 mm 2000 nm Main materials-Finishing Stainless－Opposite side of the end face nishing; Perpendicularity Within 5μm/ Full stroke. Suruga Seiki
22 mm 10 nm High sensor resolution of 10 nm; Self-locking, no heat generation at rest; Low-noise operation; Space-saving and light. PI
2 mm 1250 nm Pantograph design; 95 mm vertical travel range; 16 ball bearings; Stepping motor drive; Precision lead screw. Eksma Optics
30 mm 4000 nm Material Aluminum Alloy; Finish Clear-Matt Anodizing; Lost Motion ≦2μm. Kohzu
8 mm 1000 nm Table Size 50mm×50mm; Guide Mechanism Cross-Roller Guide; Stage Wiring Type V3. Kohzu
20 mm 2000 nm MAX speed 10mm/sec, 20mm/sec; Lost motion Within 1μm; Backlash Within 0.5μm; Straightness Within 3μm. Suruga Seiki
10 mm — CNC machined aluminium body; No limit switches necessary; Customized design possible. Qioptiq
15 mm 2000 nm Uni-directional positioning accuracy Within 6μm; Repeatability positioning accuracy Within ±0.5μm. Suruga Seiki
10 mm 500 nm Steel ball slides; 50 nm closed loop resolution; Integrated mechanical limit switches; Load capacity up to 1 kg. MICRONIX USA
20 mm 2000 nm Travel length 15mm 20mm; Table size 40×40mm 60×60mm; Feed screw (Ball screw) φ6 lead 1 φ8 lead 1. Suruga Seiki
12 mm 1000 nm Lost motion Within 1μm; Parallelism Within 50μm; Limit sensor Installed; Origin sensor Installed. Suruga Seiki
13 mm 83 nm Travel range 13 mm; Vacuum version available; Motors of other types are available. Eksma Optics
13 mm 1340 nm Travel range 13 mm (1/2"); Load capacity to 20 kg; Available with direct-measuring encoder. PI
13 mm 3 nm High stiffness for combination with piezo systems; Noncontact limit and reference point switches. PI
13 mm 5 nm Travel range 12.5 mm (1/2”); Ultra- high- resolution encoder; Active Drive motor. PI
15 mm 2000 nm Resolution (Pulse) 2μm (Full)/1μm (Half); MAX speed 10mm/ sec; Load capacity (Excitation) 5kgf [49N]. Suruga Seiki
15 mm 300 nm Resolution: 0.03 µm; Speed: 5 mm/sec; Travel: 15 mm; Built–in limit switches; Size 17 stepper motor. Newmark Systems
5 mm 2000 nm Minimized protrusions make these stages ideal for system assembly; Unconventional design. Sigma Koki
8 mm 2000 nm Travel length 6mm 8mm; Table size 40×40mm 60×60mm; Feed screw (Ball screw) φ6 lead 1 φ8 lead 1. Suruga Seiki
7 mm 10000 nm Holding power is higher than standard; Not available grease option. Suruga Seiki

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