100mm Motorized XY Stages, XYZ and Z Stages

Advanced performance products for scientists and engineers.

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Description

100 mm 50 nm The ultra-high precision performance of XM series stages is now available in a vertical orientation. Newport
150 mm 3 nm Integrated, low-profile, XY, linear-motor stage with clear aperture; Integrated cable management Aerotech
100 mm 100 nm Integrated, low-profile, XY, ball-screw stage; Long-life linear motion guide bearing system; Optional low thermal expansion. Aerotech
100 mm — Large, clear aperture; High-performance linear motion guides; Noncontact linear encoder for high accuracy. Aerotech
100 mm 3 nm Excellent geometric performance (straightness to ±0.4 μm; flatness to ±1 μm); Anti-creep, precision crossed-roller bearings. Aerotech
110 mm 1 nm Nanometer-level performance in a large travel format; High resolution (1 nm), repeatability (75 nm), and accuracy (250 nm). Aerotech
160 mm 1 nm Nanometer-level performance in a large travel format; High dynamic performance with direct-drive technology. Aerotech
190 mm 50 nm Lower profile than stacked stages; Excellent straightness and flatness motion; 100 to 350 N load capacity range. Newport
200 mm — Large, clearaperture; Travel rangefrom 100 mm x100 mm to 400 mm x400 mm; High-performance linear motion guides. Aerotech
200 mm 3 nm Integrated, low-profile, XY, linear-motor stage; Excellent geometric performance (straightness to ±0.4 μm; flatness to ±1 μm). Aerotech
250 mm 1 nm Large clear aperture; Full preload on all axes; Dual linear-motor-driven X and Y axes; Noncontact linear encoder for high accuracy. Aerotech
250 mm 3 nm Optimized for high-dynamic applications; Large selection – nine models in travel and accuracy; Aerotech
290 mm — 50 to 290 mm travel options; 100 to 350 N load capacity range; Speed up to 500 mm/s; 50 to 290 mm travel options. Newport
100 mm — Direct position feedback provides superior accuracy with minimum hysteresis; Proprietary nut design minimizes wear. Newport
100 mm 50 nm Unique Z stage design incorporates fully preloaded air bearings; ≤±2 arc sec roll, pitch, and yaw over full travel. Aerotech
150 mm 50 nm Unique Z stage design incorporates fully preloaded air bearings; Travel options from 50 to 150 mm. Aerotech
100 mm 2000 nm anti-creep crossed roller bearings; a special nut-shape ball screw; black anodized aluminum body. Sigma Koki
135 mm 100 nm High velocity constancy at 10 µm/s; Velocity to 120 mm/s, resolution 0.1 µm; Travel range to 135 mm × 85 mm. PI
150 mm 4000 nm Travel length 100mm, 150mm; Feed screw (Ball screw φ8 lead 2; Main materials-Finishing Stainless Opposite side. Suruga Seiki
150 mm — Travel ranges to 200 mm × 200 mm; Load capacity to 147 N; Low profile; Resolution to 1 nm. PI
200 mm 4000 nm Steel body offers excellent stiffness and high load capacity; The combination of HST Series and 3 axis Stage Controllers. Sigma Koki
200 mm — Cleanroom compatible; Resolution to 1 nm; Ideal for scanning applications or high precision positioning. PI
205 mm 10 nm Travel range 205 mm × 205 mm (8"); Unidirectional repeatability to 0.1 µm; Velocity to 200 mm/s. PI
205 mm — Rotary encoder with 20000 impulses/revolutions; Velocity to 90 mm/s; Unidirectional repeatability to 0.1 µm. PI
100 mm 1 nm Ideal for scanning applications or highprecision positioning; Cleanroom compatible; Travel ranges to 200 mm × 200 mm. PI
108 mm 40 nm Designed to handle 100 kg point loads; 20 nanometer resolution when used with a controller from Prior Scientific. Prior Scientific
100 mm 4000 nm Straightness of Motion [μm] 30, 40; Weight [kg] 8.8, 10.3. Sigma Koki
200 mm 4000 nm The combination of HST Series and 3 axis Stage Controllers HSC-103 can perform low-noise and low-vibration operation. Sigma Koki
130 mm 200 nm Loads to 5kg; 65mm tall; Encoder resolution to 0.1 micron; Flatness to +/- 2.5 microns; Orthogonality to 10 arc-sec. Primatics
200 mm — The KT510-SM was designed specifi cally for metrology applications; The strengths of this XY stage are the minimum. Steinmeyer Mechatronik GmbH

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