Precision Motorized Linear Stages, <25mm

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Travel RangeResolution Description
Manufacturer

25 mm 1 nm Nanometer-level performance in a large travel format; High resolution (1 nm), repeatability (75 nm), and accuracy (250 nm) Aerotech

25 mm 100 nm Compact 50 mm width, with travel to 50 mm; Precision ground ball-screw or lead-screw drive; Aerotech

25 mm 25 nm Compact stage with travels to 100 mm; Low-thermal expansion glass-scale linear encoder; Precision-ground ball-screw drive Aerotech

  — 2 nm High-accuracy noncontact linear encoder; Outstanding performance in a small footprint Aerotech

12 mm 10 nm PiezoMotor driven system; Travel range 8; Bidirectional repeatility down to 20nm; Force: 10N Nanos Instruments

10 mm 50 nm Travel range of 10 mm; Load capacity up to 1; Steel ball slide 50 nm closed loop resolution MICRONIX USA

25 mm   — The linear stage is available with either stepper motor or DC motor, and is easy to control using our FMC series motion controllers. Steinmeyer Mechatronik GmbH

10 mm 10 nm Fast scanning and positioning; avel ranges 5 mm, 10 mm, 20 mm; scanning frequencies of more than 10 Hz PI

10 mm 1000 nm Table Size: 70mm×70mm; Motion Range ±10mm; Maximum Speed 2.5mm/sec Kohzu

10 mm 1000 nm Table Size 70mm×70mm; Maximum Speed 5mm/sec; Motion Range ±10mm Kohzu

10 mm 250 nm Motion Range ±10mm; Maximum Speed 2.5mm/sec; Vertically ≦6μm/20mm Kohzu

10 mm 2000 nm Maximum Speed: 10mm/sec; Table Size 70mm×70mm; Motion Range ±10mm Kohzu

10 mm   — Table Size 70mm×70mm; Finish: Clear-Matt Anodizing; Load Capacity (Horizontal) 29.4N（3kgf） 117.6N（12kgf） Kohzu

13 mm   — Guide Mechanism: Cross-Roller Guide; Material: Aluminum Alloy; Finish: Clear-Matt Anodizing Kohzu

13 mm 1250 nm Compact design  Precise movement  13 mm travel range  X-Y-Z direct stacking Eksma Optics

13 mm 1000 nm Table Size: 100mm×100mm; Motion Range: ±12.5mm; Backlash ≦0.5μm; Finish: Clear-Matt Anodizing Kohzu

13 mm 2000 nm Feed screw (Ball screw) φ6 lead 1; Uni-directional positioning accuracy Within 6μm Suruga Seiki

15 mm 2000 nm Travel length 15mm; Feed screw (Ball screw) φ6 lead 1; Guide Linear ball guide Suruga Seiki

20 mm 100 nm compact stage design with low profile; easily configurable on multi axis; Direct drive with simple, robust construction Nanomotion

20 mm 10 nm Fast scanning and positioning; Travel ranges 5 mm, 10 mm, 20 mm; Max. velocity 250 mm/s PI

20 mm   — deformation-resistant aluminium; reflection-poor, black anodized; ground fine-thread spindle with low-backlash Owis

20 mm 2000 nm Backlash: Within 0.5μm; Parallelism: Within 30μm Straightness: Within 3μm Suruga Seiki

3 mm   — Table Size: 100mm×100mm; Material: Aluminum Alloy; Finish: Clear-Matt Anodizing Kohzu

4 mm   — Material: Aluminum Alloy; Finish: Clear-Matt Anodizing; Guide Mechanism: Cross-Roller Guide Kohzu

4 mm 1000 nm Maximum Speed: 2.5mm/sec; Repeatability: ≦±0.5μm; Material: Aluminum Alloy Kohzu

4 mm 1000 nm Maximum Speed: 2.5mm/sec; Material: Aluminum Alloy; Repeatability: ≦±0.5μm Kohzu

5 mm 10 nm Crossed roller bearings for the highest precision; Travel ranges 5 mm, 10 mm, 20 mm;  Max. velocity 250 mm/s. PI

5 mm 2000 nm Stage Wiring Type ※4 V2; Material Aluminum Alloy; Guide Mechanism Cross-Roller Guide. Kohzu

6 mm   — travel mechanism inertial piezo drive; positioner type linear; connecting wires insulated twisted pair, copper. attocube systems

6 mm   — positioner body titanium; actuator PZT ceramics; maximum torque on the axis 10 Ncm; maximum load 20 N. attocube systems

7 mm   — Table Size 70mm×70mm; Straightness ≦ 2μm/13mm; Material Aluminum Alloy. Kohzu

7 mm 1000 nm Guide Mechanism Cross-Roller Guide; Repeatability ≦±0.5μm; Table Size 100mm×100mm. Kohzu

8 mm 1000 nm Horizontal ≦1μm/15mm; Vertical ≦1μm/15mm; Table Size 50mm×50mm. Kohzu

8 mm   — footprint; height 50x50; 32mm; max installation space 50x50; 40.5mm; weight (aluminium version) 161 g. attocube systems

Precision Motorized Linear Stages, <25mm

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