Piezo Stages, 41µm – 99µm Travel Range

Advanced performance products for scientists and engineers.

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Travel Range

Description

50 µm 0.1 nm Three axis motion (XYZ); Center aperture: 0.25"; Closed loop control; Compact size. Mad City Labs
120 µm 0.7 nm Ultrahigh accuracy; Large load capacity; Fast response; high stiffness. COREMORROW
50 µm 0.05 nm Superior positioning resolution and linearity with direct-metrology capacitive sensor option. Aerotech
50 µm 0.05 nm Closed-loop travels from 10 µm to 40 µm; High-precision, frictionless flexure guidance. Aerotech
50 µm 0.2 nm Footprint 60mm W X 60mm D X 25mm H; Integrated Sensor Capacitive. nPoint
50 µm 0.2 nm Nanomotion Control XYZ; Stage Mass 365g; Maximum Load 1kg. nPoint
70 µm 0.5 nm Material Super Invar; Position Noise 0.5nm; Linearity Deviation 0.01%. nPoint
50 µm 0.1 nm highly compact design with integrated feedback sensor; accurate parallel motion by parallelogram design. Piezosystem Jena

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