Long Travel Piezo Linear Stages

Advanced Performance Products for Laser Scientists & Engineers

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Travel RangeResolution Description
Manufacturer

15000 µm   — Picomotor set and forget technology; Compact linear stage with 15mm travel; Push force >7N. Newport

1110 µm 5 nm P18 piezo nanopositioning scanners can be connected via adapters to form a variety of motion structures. COREMORROW

13000 µm 4 nm Direct Position Measurement with Incremental Encoder with up to 1 nm resolution (optional). PI

26000 µm 40 nm Travel range of up to 26 mm; 40 nm closed loop resolution standard. MICRONIX USA

4000 µm 1 nm Travel range up to 4 mm; Closed loop resolution of 20 nm; Load capacity up to 0.25 kg. MICRONIX USA

13000 µm   — Velocity 10 mm/ s; Vacuum- compatible to 10-6 hPa (Q-545.xx0); Vacuum- compatible to 10-9 hPa (Q-545.xxU). PI

51000 µm 2 nm Travel range up to 51 mm; 2 nm closed loop resolution; Low profile, 13 mm height. MICRONIX USA

12000 µm 4 nm Suitable for vacuum to 10-6 hPa, versions to 10-9 hPa available; Up to 2 nm minimum incremental motion. PI

1800 µm 2 nm Linearity error 0.02 %; Direct metrology with capacitive sensors; X, XY, Z, XYZ versions. PI

2000 µm 500 nm Extremely low profile with only 7.4 mm for serial mounting; For operation in strong magnetic fields. PI

  — 1 nm High stiffness and fast response; Material Stainless steel, Titan or Invar with ceramic bearing. Nanos Instruments

  — 10 nm Bidirectional repeatility down to 20nm; Maximum operation speed 10mm/sec; Vacuum compatibe. Nanos Instruments

12000 µm 2 nm Up to 1 nm encoder resolution; Up to 2 nm minimum incremental motion. PI

18000 µm 1 nm Travel range of 18 x 18 mm; 1 nm closed loop resolution; Load capacity up to 1 kg. MICRONIX USA

7000 µm 4 nm Only 22 mm wide and 10 mm high; Q-622 Rotation Stage mountable without adapter; XY mounting without adapter. PI

  — 100 nm Direct-measuring linear encoder with 100 nm resolution; Self-locking, no heat generation. PI

1800 µm 2 nm Travel ranges 50 to 1800 µm; Resolution to 0.1 nm; Positioning accuracy 0.02 %; Direct metrology. PI

  — 1 nm Direct measurement with PIOne incremental encoder, 0.5 nm resolution. PI

Long Travel Piezo Linear Stages

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