Piezo XY-Stage, Long Travel and Low Profile

Piezo stage offered by Micronix features long travel of 18 mm by 18 mm in XY axis. Low profile design for easy integration into motion systems. Integrated sensor provides closed loop operation with 1 nm resolution and directional repeatability of 50 nm. An accuracy of closed-loop operation is 1 µm. Steel ball bearing design allows for high load capacity of 10N with a speed of 5 mm/s. Unique multi-phase piezo motor from Micronix provides a high blocking force of great than 1 Newton. Standard versions of the piezo motor are aluminum body construction for lightweight and low cost. Piezo stage bodies can also be made from stainless steel and titanium. Design can also support vacuum operation down to 10-9 mbar. Precision XY Piezo Stage offered by Miconix.