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Linear Stages, Manual
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- <9mm
- 10mm-24mm
- 25mm-99mm
- 100mm-250mm
Linear Stages, Motorized
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- <25mm
- 25mm-99mm
- 100mm-299mm
- 300mm-1500mm
XY Stages, XYZ and Z Stages, Manual
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- XY Stages
- XYZ Stages
- Z Stages
- XZ Stages
- <9mm
- 10mm-24mm
- 25mm-99mm
- 100mm-250mm
XY Stages, XYZ and Z Stages, Motorized
- View ALL XY Stages, XYZ and Z Stages, Motorized »
- XY Stages
- XYZ Stages
- Z Stages
- <25mm
- 25mm-99mm
- 100mm-299mm
- 300mm-1500mm
Rotary Stages, Goniometer, Tilt
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- Rotary Stages
- Goniometer Stages
- Tilt Stages
Piezo Stages, Nanopositioning
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- 1µm – 40µm
- 41µm – 99µm
- 100µm – 1000µm
- >1000µm

XY Linear Stages, Motorized

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Travel Range

Description

150 mm 3 nm Integrated, low-profile, XY, linear-motor stage with clear aperture; Integrated cable management Aerotech
50 mm 1 nm motorized-xy-stage-50mm-1nm-500mms-aerotech; Nanometer-level performance in a large travel format. Aerotech
50 mm 90 nm Integrated and stiff design; Lower profile than stacked stages; Excellent straightness and flatness motion. Newport
1000 mm — Full preload on all axes; Dual linear-motor-driven Y axes; Linear encoder or laser interferometer feedback; Active yaw control. Aerotech
100 mm 100 nm Integrated, low-profile, XY, ball-screw stage; Long-life linear motion guide bearing system; Optional low thermal expansion. Aerotech
100 mm — Large, clear aperture; High-performance linear motion guides; Noncontact linear encoder for high accuracy. Aerotech
100 mm 3 nm Excellent geometric performance (straightness to ±0.4 μm; flatness to ±1 μm); Anti-creep, precision crossed-roller bearings. Aerotech
110 mm 1 nm Nanometer-level performance in a large travel format; High resolution (1 nm), repeatability (75 nm), and accuracy (250 nm). Aerotech
1200 mm — Full preload on all axes; Travel to 1.2 meter x 1.2 meter; Linear encoder or laser interferometer feedback. Aerotech
160 mm 1 nm Nanometer-level performance in a large travel format; High dynamic performance with direct-drive technology. Aerotech
190 mm 50 nm Lower profile than stacked stages; Excellent straightness and flatness motion; 100 to 350 N load capacity range. Newport
200 mm — Large, clearaperture; Travel rangefrom 100 mm x100 mm to 400 mm x400 mm; High-performance linear motion guides. Aerotech
200 mm 3 nm Integrated, low-profile, XY, linear-motor stage; Excellent geometric performance (straightness to ±0.4 μm; flatness to ±1 μm). Aerotech
250 mm 1 nm Large clear aperture; Full preload on all axes; Dual linear-motor-driven X and Y axes; Noncontact linear encoder for high accuracy. Aerotech
250 mm 3 nm Optimized for high-dynamic applications; Large selection – nine models in travel and accuracy; Aerotech
25 mm 1 nm In-position stability of <1 nm; Anti-creep crossed-roller bearings; ULTRA performance grade option. Aerotech
300 mm — 15 arc sec orthogonality; Large, clearaperture; Travel rangefrom 100 mm x100 mm to 400 mm x 400 mm. Aerotech
300 mm 3 nm Excellent geometric performance (straightness to ±0.4 μm; flatness to ±1 μm); Anti-creep, precision crossed-roller bearings. Aerotech
330 mm 3 nm Large selection – nine models in travel and accuracy; Integrated, low-profile, XY, linear-motor stage with clear aperture. Aerotech
350 mm 1 nm Linear encoder or laser interferometer feedback; Travel to 1.2 meter x 1.2 meter; Dual linear-motor-driven step axis. Aerotech
400 mm — High-performancelinear motion guides; Noncontact linearencoder for high accuracy; Large, clear aperture. Aerotech
450 mm — Advanced silicon-carbide structure for highdynamics and ultra-precise motion performance. Aerotech
500 mm — Travel to 1.2 m x1.2 m; Faster turnaround and minimized settling times; Active yaw control. Aerotech
500 mm — Active yaw control; Dual linear-motor-driven Y axes; Full preload on all axes; Dual linear-motor-driven Y axes. Aerotech
600 mm — Proprietary reaction-mass design enables fast turnaround and move-and-settle times; Encoder or laser interferometer feedback. Aerotech
60 mm 1 nm ULTRA performance grade option; High dynamic performance with direct-drive technology; In-position stability of <1 nm. Aerotech
750 mm — Active and passive isolation system options; Advanced control solutions offer enhanced throughput. Aerotech
750 mm — Travel to 1.2 meter x 1.2 meter; Active yaw control; Linear encoder or laser interferometer feedback. Aerotech
300 mm — Active yaw control; Travel to 1.2 meter x 1.2 meter; Dual linear-motor-driven Y axes; Full preload on all axes. Aerotech
90 mm 50 nm Speed up to 500 mm/s; Excellent straightness and flatness motion; 50 to 290 mm travel options. Newport
20 mm 2000 nm Travel length 15mm, 20mm; Table size 40×40mm, 60×60mm; Guide Crossed roller guide. Suruga Seiki
100 mm 2000 nm anti-creep crossed roller bearings; a special nut-shape ball screw; black anodized aluminum body. Sigma Koki
10 mm 1000 nm Table Size 70mm×70mm; Guide Mechanism Cross-Roller Guide; Lead Mechanism Ball Screw, Lead 1.0mm. Kohzu
135 mm 100 nm High velocity constancy at 10 µm/s; Velocity to 120 mm/s, resolution 0.1 µm; Travel range to 135 mm × 85 mm. PI
150 mm 4000 nm Travel length 100mm, 150mm; Feed screw (Ball screw φ8 lead 2; Main materials-Finishing Stainless Opposite side. Suruga Seiki
150 mm — Travel ranges to 200 mm × 200 mm; Load capacity to 147 N; Low profile; Resolution to 1 nm. PI
154 mm 40 nm Incorporates IST and stage mapping systems; Anti-backlash mechanism with adjustable limit switches. Prior Scientific
15 mm 2000 nm Main materials-Finishing Stainless－Opposite side of the end face nishing; Perpendicularity Within 5μm/ Full stroke. Suruga Seiki
200 mm 4000 nm Steel body offers excellent stiffness and high load capacity; The combination of HST Series and 3 axis Stage Controllers. Sigma Koki
200 mm — Cleanroom compatible; Resolution to 1 nm; Ideal for scanning applications or high precision positioning. PI
205 mm 10 nm Travel range 205 mm × 205 mm (8"); Unidirectional repeatability to 0.1 µm; Velocity to 200 mm/s. PI
205 mm — Rotary encoder with 20000 impulses/revolutions; Velocity to 90 mm/s; Unidirectional repeatability to 0.1 µm. PI
22 mm 10 nm High sensor resolution of 10 nm; Self-locking, no heat generation at rest; Low-noise operation; Space-saving and light. PI
25 mm — For inverted microscopes made by Nikon, Zeiss, Leica, and Olympus; Travel range 25 mm × 25 mm. PI
2 mm 1250 nm Pantograph design; 95 mm vertical travel range; 16 ball bearings; Stepping motor drive; Precision lead screw. Eksma Optics
300 mm 20000 nm Table size 180×180mm; Guide Slide guide; Main materials-Finishing Aluminum Black almite finishing. Suruga Seiki
300 mm 4000 nm U-shaped rail offers light weight, and minimized deflection to achieve high stiffness. Sigma Koki
300 mm 4000 nm Travel length 200mm, 300mm; Table size 60×60mm; Load capacity 10kgf [98N]. Suruga Seiki
30 mm 2000 nm Travel length 30mm; Table size 60×70mm; Feed screw Ball screwφ8 lead 1; Guide Crossed roller guide. Suruga Seiki
30 mm 2000 nm Guide Linear ball guide; Main materials-Finishing Stainless Opposite side of the end face finishing. Suruga Seiki
30 mm 4000 nm Material Aluminum Alloy; Finish Clear-Matt Anodizing; Lost Motion ≦2μm. Kohzu
350 mm 1 nm Clean room compatible; Travel ranges to 500 mm × 1000 mm; Load capacity to 245 N; Resolution to 1 nm. PI
500 mm 20000 nm Stepping motor driven stages, ideal for positioning of measuring instruments. Sigma Koki
500 mm 1 nm Ideal for scanning applications or high-precision positioning; Travel ranges to 500 mm × 1000 mm. PI
50 mm 1000 nm Guide Crossed roller guide; MAX speed 10mm/sec; Perpendicularity Within 30μm/Full stroke. Suruga Seiki
50 mm 2000 nm A dedicated hex wrench for fixing bottom axis of XY is attached. Suruga Seiki
50 mm — Resolution to 1 nm; Travel ranges to 200 mm × 200 mm; Load capacity to 147 N; Low profile. PI
75 mm 4000 nm Backlash Within 1μm; Straightness Within 3μm; Pitching/ Yawing Within 20″/Within 15″. Suruga Seiki
85 mm 2000 nm Travel [mm] 35 85; Stage Size [mm] 85×85, 85×85. Sigma Koki
8 mm 1000 nm Table Size 50mm×50mm; Guide Mechanism Cross-Roller Guide; Stage Wiring Type V3. Kohzu
100 mm 1 nm Ideal for scanning applications or highprecision positioning; Cleanroom compatible; Travel ranges to 200 mm × 200 mm. PI
108 mm 40 nm Designed to handle 100 kg point loads; 20 nanometer resolution when used with a controller from Prior Scientific. Prior Scientific
130 mm 200 nm Loads to 5kg; 65mm tall; Encoder resolution to 0.1 micron; Flatness to +/- 2.5 microns; Orthogonality to 10 arc-sec. Primatics
200 mm — The KT510-SM was designed specifi cally for metrology applications; The strengths of this XY stage are the minimum. Steinmeyer Mechatronik GmbH
50 mm — The KT180 is a universally usable XY stage that is characterized by extremely flat at design. Steinmeyer Mechatronik GmbH
300 mm — Straight, flat motion ideal for inspection; Center clearance allows access to top and bottom of payload. Primatics
50 mm 10000 nm Preloaded ball bearings guides; Long life. Qioptiq
7 mm 10000 nm Holding power is higher than standard; Not available grease option. Suruga Seiki
320 mm — These compact XY stages have been specially developed as fast scanning stages for a range of measurement applications. Steinmeyer Mechatronik GmbH

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