XY Linear Stages, Motorized

Advanced Performance Products for Laser Scientists & Engineers

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Travel RangeResolution Description
Manufacturer

150 mm 3 nm Integrated, low-profile, XY, linear-motor stage with clear aperture; Integrated cable management Aerotech

50 mm 1 nm motorized-xy-stage-50mm-1nm-500mms-aerotech; Nanometer-level performance in a large travel format. Aerotech

50 mm 90 nm Integrated and stiff design; Lower profile than stacked stages; Excellent straightness and flatness motion. Newport

1000 mm   — Full preload on all axes; Dual linear-motor-driven Y axes; Linear encoder or laser interferometer feedback; Active yaw control. Aerotech

100 mm 100 nm Integrated, low-profile, XY, ball-screw stage; Long-life linear motion guide bearing system; Optional low thermal expansion. Aerotech

100 mm   — Large, clear aperture; High-performance linear motion guides; Noncontact linear encoder for high accuracy. Aerotech

100 mm 3 nm Excellent geometric performance (straightness to ±0.4 μm; flatness to ±1 μm); Anti-creep, precision crossed-roller bearings. Aerotech

110 mm 1 nm Nanometer-level performance in a large travel format; High resolution (1 nm), repeatability (75 nm), and accuracy (250 nm). Aerotech

1200 mm   — Full preload on all axes; Travel to 1.2 meter x 1.2 meter; Linear encoder or laser interferometer feedback. Aerotech

160 mm 1 nm Nanometer-level performance in a large travel format; High dynamic performance with direct-drive technology. Aerotech

190 mm 50 nm Lower profile than stacked stages; Excellent straightness and flatness motion; 100 to 350 N load capacity range. Newport

200 mm   — Large, clearaperture; Travel rangefrom 100 mm x100 mm to 400 mm x400 mm; High-performance linear motion guides. Aerotech

200 mm 3 nm Integrated, low-profile, XY, linear-motor stage; Excellent geometric performance (straightness to ±0.4 μm; flatness to ±1 μm). Aerotech

250 mm 1 nm Large clear aperture; Full preload on all axes; Dual linear-motor-driven X and Y axes; Noncontact linear encoder for high accuracy. Aerotech

250 mm 3 nm Optimized for high-dynamic applications; Large selection – nine models in travel and accuracy; Aerotech

25 mm 1 nm In-position stability of <1 nm; Anti-creep crossed-roller bearings; ULTRA performance grade option. Aerotech

300 mm   — 15 arc sec orthogonality; Large, clearaperture; Travel rangefrom 100 mm x100 mm to 400 mm x 400 mm. Aerotech

300 mm 3 nm Excellent geometric performance (straightness to ±0.4 μm; flatness to ±1 μm); Anti-creep, precision crossed-roller bearings. Aerotech

330 mm 3 nm Large selection – nine models in travel and accuracy; Integrated, low-profile, XY, linear-motor stage with clear aperture. Aerotech

350 mm 1 nm Linear encoder or laser interferometer feedback; Travel to 1.2 meter x 1.2 meter; Dual linear-motor-driven step axis. Aerotech

400 mm   — High-performancelinear motion guides; Noncontact linearencoder for high accuracy; Large, clear aperture. Aerotech

450 mm   — Advanced silicon-carbide structure for highdynamics and ultra-precise motion performance. Aerotech

500 mm   — Travel to 1.2 m x1.2 m; Faster turnaround and minimized settling times; Active yaw control. Aerotech

500 mm   — Active yaw control; Dual linear-motor-driven Y axes; Full preload on all axes; Dual linear-motor-driven Y axes. Aerotech

600 mm   — Proprietary reaction-mass design enables fast turnaround and move-and-settle times; Encoder or laser interferometer feedback. Aerotech

60 mm 1 nm ULTRA performance grade option; High dynamic performance with direct-drive technology; In-position stability of <1 nm. Aerotech

750 mm   — Active and passive isolation system options; Advanced control solutions offer enhanced throughput. Aerotech

750 mm   — Travel to 1.2 meter x 1.2 meter; Active yaw control; Linear encoder or laser interferometer feedback. Aerotech

300 mm   — Active yaw control; Travel to 1.2 meter x 1.2 meter; Dual linear-motor-driven Y axes; Full preload on all axes. Aerotech

90 mm 50 nm Speed up to 500 mm/s; Excellent straightness and flatness motion; 50 to 290 mm travel options. Newport

20 mm 2000 nm Travel length 15mm, 20mm; Table size 40×40mm, 60×60mm; Guide Crossed roller guide. Suruga Seiki

100 mm 2000 nm anti-creep crossed roller bearings; a special nut-shape ball screw; black anodized aluminum body. Sigma Koki

10 mm 1000 nm Table Size 70mm×70mm; Guide Mechanism Cross-Roller Guide; Lead Mechanism Ball Screw, Lead 1.0mm. Kohzu

135 mm 100 nm High velocity constancy at 10 µm/s; Velocity to 120 mm/s, resolution 0.1 µm; Travel range to 135 mm × 85 mm. PI

150 mm 4000 nm Travel length 100mm, 150mm; Feed screw (Ball screw φ8 lead 2; Main materials-Finishing Stainless Opposite side. Suruga Seiki

150 mm   — Travel ranges to 200 mm × 200 mm; Load capacity to 147 N; Low profile; Resolution to 1 nm. PI

154 mm 40 nm Incorporates IST and stage mapping systems; Anti-backlash mechanism with adjustable limit switches. Prior Scientific

15 mm 2000 nm Main materials-Finishing Stainless－Opposite side of the end face nishing; Perpendicularity Within 5μm/ Full stroke. Suruga Seiki

200 mm 4000 nm Steel body offers excellent stiffness and high load capacity; The combination of HST Series and 3 axis Stage Controllers. Sigma Koki

200 mm   — Cleanroom compatible; Resolution to 1 nm; Ideal for scanning applications or high precision positioning. PI

205 mm 10 nm Travel range 205 mm × 205 mm (8"); Unidirectional repeatability to 0.1 µm; Velocity to 200 mm/s. PI

205 mm   — Rotary encoder with 20000 impulses/revolutions; Velocity to 90 mm/s; Unidirectional repeatability to 0.1 µm. PI

22 mm 10 nm High sensor resolution of 10 nm; Self-locking, no heat generation at rest; Low-noise operation; Space-saving and light. PI

25 mm   — For inverted microscopes made by Nikon, Zeiss, Leica, and Olympus; Travel range 25 mm × 25 mm. PI

2 mm 1250 nm Pantograph design; 95 mm vertical travel range; 16 ball bearings; Stepping motor drive; Precision lead screw. Eksma Optics

300 mm 20000 nm Table size 180×180mm; Guide Slide guide; Main materials-Finishing Aluminum Black almite finishing. Suruga Seiki

300 mm 4000 nm U-shaped rail offers light weight, and minimized deflection to achieve high stiffness. Sigma Koki

300 mm 4000 nm Travel length 200mm, 300mm; Table size 60×60mm; Load capacity 10kgf [98N]. Suruga Seiki

30 mm 2000 nm Travel length 30mm; Table size 60×70mm; Feed screw Ball screwφ8 lead 1; Guide Crossed roller guide. Suruga Seiki

30 mm 2000 nm Guide Linear ball guide; Main materials-Finishing Stainless Opposite side of the end face finishing. Suruga Seiki

30 mm 4000 nm Material Aluminum Alloy; Finish Clear-Matt Anodizing; Lost Motion ≦2μm. Kohzu

350 mm 1 nm Clean room compatible; Travel ranges to 500 mm × 1000 mm; Load capacity to 245 N; Resolution to 1 nm. PI

500 mm 20000 nm Stepping motor driven stages, ideal for positioning of measuring instruments. Sigma Koki

500 mm 1 nm Ideal for scanning applications or high-precision positioning; Travel ranges to 500 mm × 1000 mm. PI

50 mm 1000 nm Guide Crossed roller guide; MAX speed 10mm/sec; Perpendicularity Within 30μm/Full stroke. Suruga Seiki

50 mm 2000 nm A dedicated hex wrench for fixing bottom axis of XY is attached. Suruga Seiki

50 mm   — Resolution to 1 nm; Travel ranges to 200 mm × 200 mm; Load capacity to 147 N; Low profile. PI

75 mm 4000 nm Backlash Within 1μm; Straightness Within 3μm; Pitching/ Yawing Within 20″/Within 15″. Suruga Seiki

85 mm 2000 nm Travel [mm] 35 85; Stage Size [mm] 85×85, 85×85. Sigma Koki

8 mm 1000 nm Table Size 50mm×50mm; Guide Mechanism Cross-Roller Guide; Stage Wiring Type V3. Kohzu

100 mm 1 nm Ideal for scanning applications or highprecision positioning; Cleanroom compatible; Travel ranges to 200 mm × 200 mm. PI

108 mm 40 nm Designed to handle 100 kg point loads; 20 nanometer resolution when used with a controller from Prior Scientific. Prior Scientific

130 mm 200 nm Loads to 5kg; 65mm tall; Encoder resolution to 0.1 micron; Flatness to +/- 2.5 microns; Orthogonality to 10 arc-sec. Primatics

200 mm   — The KT510-SM was designed specifi cally for metrology applications; The strengths of this XY stage are the minimum. Steinmeyer Mechatronik GmbH

50 mm   — The KT180 is a universally usable XY stage that is characterized by extremely flat at design. Steinmeyer Mechatronik GmbH

300 mm   — Straight, flat motion ideal for inspection; Center clearance allows access to top and bottom of payload. Primatics

50 mm 10000 nm Preloaded ball bearings guides; Long life. Qioptiq

7 mm 10000 nm Holding power is higher than standard; Not available grease option. Suruga Seiki

320 mm   — These compact XY stages have been specially developed as fast scanning stages for a range of measurement applications. Steinmeyer Mechatronik GmbH

XY Linear Stages, Motorized

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