Open Frame XY Stage, 130mm Travel Range

The Primatics POF65 is an open frame, high precision linear motion stage with anti-creep cage cross roller linear bearings. Please refer to the data sheet attached for full specifications. The POF65 provides 130 mm of travel and 1000 nm resolution with maximum speed of 600 mm/s. It is characterized with a large aperture design, with 110mm aperture at the center of travel, it allows access to both sides of the customer load during operation making it ideal for applications requiring very accurate flat motion. Applications include wafer inspection, scanning microscopy and precision assembly.

The POF65 features recirculating linear guides providing fully supported bearing structure which minimizes angular errors during motion, making it ideal for fast, repetitive operations. The linear guide bearings also exhibit exceptional stiffness and high load capacity.