Motorized Z Linear Stage

Advanced Performance Products for Laser Scientists & Engineers

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Travel RangeResolution Description
Manufacturer

100 mm 50 nm The ultra-high precision performance of XM series stages is now available in a vertical orientation. Newport

100 mm   — Direct position feedback provides superior accuracy with minimum hysteresis; Proprietary nut design minimizes wear. Newport

100 mm 50 nm Unique Z stage design incorporates fully preloaded air bearings; ≤±2 arc sec roll, pitch, and yaw over full travel. Aerotech

10 mm 5 nm Precision-ground ball screw for high performance; Submicron closed-loop positioning. Aerotech

150 mm 50 nm Unique Z stage design incorporates fully preloaded air bearings; Travel options from 50 to 150 mm. Aerotech

1 mm   — Easily configured with ARA1000 for multi-axis applications; High stiffness; High accuracy; High load-carrying capability. Aerotech

20 mm 50 nm 20 mm travel range; Speed of 5 mm/s; 500 N load capacity. Newport

25 mm 200 nm Low-cost, high-performance stage; 6, 13, and 25 mm travel models; Integral or removable motor. Aerotech

25 mm 2 nm High dynamic performance; Nanometer performance in a large travel format (25 and 50 mm). Aerotech

2 mm   — Easily configured with ARA1000 for multi-axis applications; High load-carrying capability; High accuracy. Aerotech

300 mm   — Four-way, equally load ball bearings offer best support for high cantilevered loads; Self-locking lead screw. Newport

30 mm 50 nm Ideal for horizontal samples, the GTS30V offers unobstructed access to the payload from any side. Newport

35 mm 2 nm Anti-creep crossed-roller bearings; High dynamic performance; In-position stability of <2 nm. Aerotech

3 mm 2 nm Nanometer performance with 3 mm vertical travel; High resolution (1 nm), repeatability (100 nm), and accuracy (200 nm). Aerotech

50 mm 2 nm In-position stability of <2 nm; Nanometer performance in a large travel format (25 and 50 mm). Aerotech

50 mm 50 nm ≤±2 arc sec roll, pitch, and yaw over full travel; Precision-ground ball-screw-drive eliminates the need for special counterbalance. Aerotech

5 mm 1 nm Low profile for space-conscious applications; Noncontact direct-drive; High repeatability; Aerotech

5 mm 2 nm Nanometer performance with 5 mm vertical travel; High dynamic performance; In-position stability of <2 nm. Aerotech

5 mm 5 nm High-load lift stage with aperture; 5 mm travel; custom designs for alternate travels available; Aerotech

5 mm 20 nm Integrated linear encoder provides 0.02µm position feedback for highly repeatable and accurate motion. Newport

6 mm 200 nm Integral or removable motor; 6, 13, and 25 mm travel models; Long-life linear guide bearing system. Aerotech

13 mm 200 nm Submicron closed-loop positioning; 6, 13, and 25 mm travel models; Low-cost, high-performance stage. Aerotech

20 mm 2000 nm Travel length 15mm 20mm; Table size 40×40mm 60×60mm; Feed screw (Ball screw) φ6 lead 1 φ8 lead 1. Suruga Seiki

12 mm 1000 nm Lost motion Within 1μm; Parallelism Within 50μm; Limit sensor Installed; Origin sensor Installed. Suruga Seiki

13 mm 83 nm Travel range 13 mm; Vacuum version available; Motors of other types are available. Eksma Optics

13 mm 1340 nm Travel range 13 mm (1/2"); Load capacity to 20 kg; Available with direct-measuring encoder. PI

13 mm 3 nm High stiffness for combination with piezo systems; Noncontact limit and reference point switches. PI

13 mm 5 nm Travel range 12.5 mm (1/2”); Ultra- high- resolution encoder; Active Drive motor. PI

15 mm 2000 nm Resolution (Pulse) 2μm (Full)/1μm (Half); MAX speed 10mm/ sec; Load capacity (Excitation) 5kgf [49N]. Suruga Seiki

15 mm 300 nm Resolution: 0.03 µm; Speed: 5 mm/sec; Travel: 15 mm; Built–in limit switches; Size 17 stepper motor. Newmark Systems

200 mm 4000 nm The combination of HST Series and 3 axis Stage Controllers HSC-103 can perform low-noise and low-vibration operation. Sigma Koki

25 mm 30 nm Resolution: 0.03 µm; Speed: 10 mm/sec; Compact Size; Lightweight. Newmark Systems

26 mm 5000 nm Travel range 26 mm (1"); High-resolution encoder; Zero-play ball screws; MTBF 10000 h; Self locking to 10 kg. PI

300 mm 4000 nm Positioning Slide Outer rail structure; Finish Black anodized. Sigma Koki

30 mm 2000 nm Travel length 30mm; Table size 60×70mm; Feed screw Ball screwφ8 lead 1; Guide Crossed roller guide. Suruga Seiki

30 mm 2000 nm Feed screw (Ball screw) φ8 lead 1; Guide Linear ball guide; Pitching/ Yawing Within 20″/15″. Suruga Seiki

500 mm 20000 nm Weight [kg] 14.5, 16.1; Load Capacity [N] 58.8 (6.0kgf). Sigma Koki

50 mm 1000 nm Guide Crossed roller guide; Lost motion Within 1μm; Straightness Within 2μm. Suruga Seiki

5 mm 2000 nm Minimized protrusions make these stages ideal for system assembly; Unconventional design. Sigma Koki

75 mm 4000 nm Main materials-Finishing Stainless Opposite side of the end face finishing; MAX speed 20mm/ sec. Suruga Seiki

85 mm 2000 nm MAX Speed [mm/sec] 5; Pitch [″] / Yaw [″] 45/20; Backlash [μm] 3. Sigma Koki

8 mm 2000 nm Travel length 6mm 8mm; Table size 40×40mm 60×60mm; Feed screw (Ball screw) φ6 lead 1 φ8 lead 1. Suruga Seiki

Motorized Z Linear Stage

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