Motorized Z Stage, 5 mm travel range 5mm/second

Recirculating ball bearing vertical motion stage from Newport. The low profile 5 mm vertical motion is designed for semiconductor wafer inspection, photonics test and packaging, micro-assembly, precision metrology, surface inspection systems, etc. An arrangement of two wedges which move past each other via an incline plane design are constrained by two pairs of vertically mounted double-row linear ball bearing slides which allows for pure vertical motion while constraining side motion. A DC servo motor with tachometer with a long-life ball screw ensures speed motion and minimum settling time with a 20000 hour MTBF reliability. The motor allows for a maximum speed of 5 mm/s at a resolution of 0 nm. Manual motion can be accomplished using a standard screw driver. The pitch and roll are held to an accuracy of 20 arc sec. The aluminum base material and configuration of the linear scale directly attached to the moving rail limits total weight of the unit to 2.4 kgs. This design is based of Newport’s proven design of the VP-25XA linear stages and uses a versatile grid of threaded holes on the top plate to allow compatibility to other Newport positioning stages.