50mm Motorized XY Stage, 1nm resolution

These two-axis XY direct drive nanopositioning stages from Aerotech are 50 mm travel stages with 1nm resolution. The high resolution presents nanometer-level performance in a large travel format. The data sheet attached refers to the following key features: The positioners are part of the ANT series which feature crossed-roller bearings, linear motors, and dual-axis motion in a compact profile. Non- contact direct drive technology offers an accurate, high-speed, and robust positioning solution. The non-contact design allows for +/- 2.5 um accuracy, 1 nm resolution, and +/- 25 nm repeatability (unidirectional) with a maximum speed of 500 mm/s.

Aerotech's direct drive does not experience hysteresis or backlash. Crossed-roller bearings protect against creep and give exceptional stability and smoothness during operation. The bearings along with the stiff design allow for the critical geometric tolerances to be minimal with straightness and flatness held to +/- 1 um, pitch, roll, and orthogonality held to 49 urad, and a yaw of 24 urad. Construction consists of a aluminum body with black hard-coat bringing the system mass to 3.2 kg. High performance stage is ideal for many applications that require high precision positioning including disk-drive fabrication, fiber alignment, and optical delay element actuation along with any other demanding motion processes. The ANT95XY can be combined with other ANT series devices like vertical lift stages, direct drive rotaries and goniometers to create custom high performance multi axis systems.

Aerotech also offers performance grade options in order to achieve the highest possible system accuracy. Both the Plus and ULTRA grade options offer increases in accuracy and performance by utilizing advanced calibration systems and Aerotech's controllers. ULTRA systems can guarantee two-dimensional accuracy of +/- 250 nm or better.