Aerotech

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MANUAL LINEAR STAGES

Travel Range

Resolution (µm/turn)

Description

12 mm 0.05 µm Micrometer or patented* sub-micronresolution drive; 12 mm and 25 mm travel; Low profile Aerotech
25 mm 0.25 µm Crossed-roller bearings for superior positioning performance; Low profile Aerotech

MOTORIZED LINEAR STAGES

Travel Range

Description

XY STAGES MOTORIZED

Travel Range

Description

150 mm 3 nm Integrated, low-profile, XY, linear-motor stage with clear aperture; Integrated cable management Aerotech
50 mm 1 nm motorized-xy-stage-50mm-1nm-500mms-aerotech; Nanometer-level performance in a large travel format. Aerotech
1000 mm — Full preload on all axes; Dual linear-motor-driven Y axes; Linear encoder or laser interferometer feedback; Active yaw control. Aerotech
100 mm 100 nm Integrated, low-profile, XY, ball-screw stage; Long-life linear motion guide bearing system; Optional low thermal expansion. Aerotech
100 mm — Large, clear aperture; High-performance linear motion guides; Noncontact linear encoder for high accuracy. Aerotech
100 mm 3 nm Excellent geometric performance (straightness to ±0.4 μm; flatness to ±1 μm); Anti-creep, precision crossed-roller bearings. Aerotech
110 mm 1 nm Nanometer-level performance in a large travel format; High resolution (1 nm), repeatability (75 nm), and accuracy (250 nm). Aerotech
1200 mm — Full preload on all axes; Travel to 1.2 meter x 1.2 meter; Linear encoder or laser interferometer feedback. Aerotech
160 mm 1 nm Nanometer-level performance in a large travel format; High dynamic performance with direct-drive technology. Aerotech
200 mm — Large, clearaperture; Travel rangefrom 100 mm x100 mm to 400 mm x400 mm; High-performance linear motion guides. Aerotech
200 mm 3 nm Integrated, low-profile, XY, linear-motor stage; Excellent geometric performance (straightness to ±0.4 μm; flatness to ±1 μm). Aerotech
250 mm 1 nm Large clear aperture; Full preload on all axes; Dual linear-motor-driven X and Y axes; Noncontact linear encoder for high accuracy. Aerotech
250 mm 3 nm Optimized for high-dynamic applications; Large selection – nine models in travel and accuracy; Aerotech
25 mm 1 nm In-position stability of <1 nm; Anti-creep crossed-roller bearings; ULTRA performance grade option. Aerotech
300 mm — 15 arc sec orthogonality; Large, clearaperture; Travel rangefrom 100 mm x100 mm to 400 mm x 400 mm. Aerotech
300 mm 3 nm Excellent geometric performance (straightness to ±0.4 μm; flatness to ±1 μm); Anti-creep, precision crossed-roller bearings. Aerotech
300 mm — Active yaw control; Travel to 1.2 meter x 1.2 meter; Dual linear-motor-driven Y axes; Full preload on all axes. Aerotech
330 mm 3 nm Large selection – nine models in travel and accuracy; Integrated, low-profile, XY, linear-motor stage with clear aperture. Aerotech
350 mm 1 nm Linear encoder or laser interferometer feedback; Travel to 1.2 meter x 1.2 meter; Dual linear-motor-driven step axis. Aerotech
400 mm — High-performancelinear motion guides; Noncontact linearencoder for high accuracy; Large, clear aperture. Aerotech
450 mm — Advanced silicon-carbide structure for highdynamics and ultra-precise motion performance. Aerotech
500 mm — Travel to 1.2 m x1.2 m; Faster turnaround and minimized settling times; Active yaw control. Aerotech
500 mm — Active yaw control; Dual linear-motor-driven Y axes; Full preload on all axes; Dual linear-motor-driven Y axes. Aerotech
600 mm — Proprietary reaction-mass design enables fast turnaround and move-and-settle times; Encoder or laser interferometer feedback. Aerotech
60 mm 1 nm ULTRA performance grade option; High dynamic performance with direct-drive technology; In-position stability of <1 nm. Aerotech
750 mm — Active and passive isolation system options; Advanced control solutions offer enhanced throughput. Aerotech
750 mm — Travel to 1.2 meter x 1.2 meter; Active yaw control; Linear encoder or laser interferometer feedback. Aerotech
100 mm 50 nm Unique Z stage design incorporates fully preloaded air bearings; ≤±2 arc sec roll, pitch, and yaw over full travel. Aerotech
10 mm 5 nm Precision-ground ball screw for high performance; Submicron closed-loop positioning. Aerotech
150 mm 50 nm Unique Z stage design incorporates fully preloaded air bearings; Travel options from 50 to 150 mm. Aerotech
1 mm — Easily configured with ARA1000 for multi-axis applications; High stiffness; High accuracy; High load-carrying capability. Aerotech
25 mm 200 nm Low-cost, high-performance stage; 6, 13, and 25 mm travel models; Integral or removable motor. Aerotech
25 mm 2 nm High dynamic performance; Nanometer performance in a large travel format (25 and 50 mm). Aerotech
2 mm — Easily configured with ARA1000 for multi-axis applications; High load-carrying capability; High accuracy. Aerotech
35 mm 2 nm Anti-creep crossed-roller bearings; High dynamic performance; In-position stability of <2 nm. Aerotech
3 mm 2 nm Nanometer performance with 3 mm vertical travel; High resolution (1 nm), repeatability (100 nm), and accuracy (200 nm). Aerotech
50 mm 2 nm In-position stability of <2 nm; Nanometer performance in a large travel format (25 and 50 mm). Aerotech
50 mm 50 nm ≤±2 arc sec roll, pitch, and yaw over full travel; Precision-ground ball-screw-drive eliminates the need for special counterbalance. Aerotech
5 mm 1 nm Low profile for space-conscious applications; Noncontact direct-drive; High repeatability; Aerotech
5 mm 2 nm Nanometer performance with 5 mm vertical travel; High dynamic performance; In-position stability of <2 nm. Aerotech
5 mm 5 nm High-load lift stage with aperture; 5 mm travel; custom designs for alternate travels available; Aerotech
60 mm 2 nm Anti-creep crossed-roller bearings; In-position stability of <2 nm; High dynamic performance. Aerotech
6 mm 200 nm Integral or removable motor; 6, 13, and 25 mm travel models; Long-life linear guide bearing system. Aerotech
13 mm 200 nm Submicron closed-loop positioning; 6, 13, and 25 mm travel models; Low-cost, high-performance stage. Aerotech

ROTARY STAGES

Rotation Range

Resolution (arcsec)

Description

PIEZO STAGES NANOPOSITIONING

Travel Range

Description

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