150mm Motorized XY Stage, 3nm, 1500mm/s

Motorized two axis XY direct drive stage from Aerotech. The Planar-DLA series offers a clear aperture stage with precise dynamic motion and geometric performance in a compact package. Class leading planar geometric performance for utilization in applications where straightness and flatness are critical. The upper axis and lower axis straightness are +/- 1.5 um and +/- 2.5 um respectively while the flatness is +/- 1.25 um over the entire 150 mm x 150 mm range of travel. Stage offers accuracy in a highly dynamic stage with a max speed of 1500 mm/s and a max acceleration of 1 g. Load capacity for the system is 20 kg while the accuracy is held to +/- 5 um. Noncontact linear encoder provides feedback for the system with a resolution of 3 nm. Bidirectional repeatabiliby is +/- 0.5 um. Direct-drive, non contact technology drives the system while providing accurate positioning and giving a maintenance-free operation and long service length. Planar-DLA stages are available with either one or two motors per axis direction. The two motor option applies force through the centers of friction and stiffness for optimal geometric performance and accuracy. One motor stages provide a more economical option where the strictest positioning and high-throughput are not required. Cable management is integrated to ensure long life and performance. Solutions for additional servo axes, air/vacuum lines, or other process pneumatics are also available. Stages are constructed from aluminum and have a black anodized finish to give a final stage mass of 30 kg -36 kg depending on motor options. Motor options are also offered that can increase the max acceleration to 1.5 g and increase certain geometric properties. The Planar-DLR offers three positioning performance options, Base, Plus, and Ultra, that can further increase the accuracy and geometric performance of the stage.