Piezo Stage 35mm 1nm

Linear Piezo Apature Stage from Nanos Instruments. PiezoMotor driven system with a travel range of 30 mm and a 30 mm Aperture. The LPS_60A system features an integrated linear encoder developed by NANOS Instruments and a customized PiezoMotor. Designed for stiff operation with accurate movements, stage utilizes cross roller bearings in either steel or ceramic to give bidirectional repeatability down to 1 nm and a open loop stiffness of 3 N/um. The Piezo motor combined with the integrated zero drift encoder allows for a maximum operation speed of 10 mm/sec with practically zero drift. Fast moves of 1 um and 10 um are also possible at 6 ms and 15 ms respectfully. For applications where faster velocities are required the LEGS-Drive-Ultra can be opted for to receive a package with 50 mm/s fast movements to achieve moves of 10 um in 4 ms and 1 um in less than 4 ms. Integrated optical sensor only generates 20 mW and is cooled using a special profile. Low profile high quality stage is available in Stainless steel, Titan, or Invar together with a robax scale. This stage is vacuum compatible and is nonmagnetic.