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- Max travel range: 20μm
- Max load: 5kg
- Aperture: Ø106mm
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P77 piezo nanopositioning scanner is a Z-axis motion stage with drived by piezo actuators. The center of the piezo scanner is a 106mm large aperture. Z-axis displacement of 20μm can be realized . The guide mechanism has an ultra-high resolution, and the closed-loop version can achieve positioning accuracy of nanometer, which is the first choice for optical phase shifters.
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