Request Quote sku / item#: RLS-NPX25-105 ships: Contact
- Compact Footprint: 62mm x 40mm x 18.5mm (Width x Depth x Height)
- Travel Range: 25µm (Closed Loop)
- Travel Range: 40µm (Open Loop)
- Maximum Load: 1kg
- Max Force: 100N/20N (Push/Pull)
- Material: Aluminum
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Piezo stage with closed loop operation up to 25µm is designed and manufactured by nPoint. Applications for this nanopositioning stage include wafer inspection, mask alignment, and lithography. For closed loop operation the NPX25-105 features an integrated capacitive sensor. The piezo stage has a push force of 100N and pull force of 20N with loads up to 1 kg. The standard stage features all aluminum construction; please contact nPoint for other material options.
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