PI Piezo Stage, 12 µm Range with 50 pm resolution

Piezo nanopositioning stage from PI with 12 µm travel range. The resolution of this stage is 0.05 nm with a closed-loop linearity of 0.03% and repeatability of +/- 1 nm. The direct-drive provides fast response and the design is flexible as the stage can be used a standard flexure stage or an actuator for a larger system. As an actuator the compact PI stage has a high push force of 100 N and pull force of 20 N. The stage has a load capacity of 10 kg when mounted in the horizontal and 2 kg when mounted vertical. The use of a capacitive sensors provides the piezo stage high linearity and stability. high dynamic piezo stage offered by PI.