XYZ Piezo Stage, 100µm Travel, 0.2nm resolution

The model NPXYZ100 model is a three axis NanoPositioning Linear Stage that provides 100µm travel per axis and 0.2nm resolution.
The attached data sheet references the key following features: These stages offer a precision parallelogram design for accurate linear displacement and high resonant frequency for highly dynamic applications. This model provides highly reliable, multi-layer, low voltage piezoelectric transducer (PZT) stacks for high duty cycle operations. Its frictionless guide principle makes it maintenance-free and its output motion sensitivity is not affected by mechanical friction. It is suited for high precision positioning of small components such as mirrors, fibers, laser diodes, micro-optics, sensors, or cellular samples. One of its advantages over traditional screw driven stages is the rapid response and fast settling performance. This can be used in dynamic processes such as high-frequency error compensation, tracking, fast stepping or continuous scanning.


The NPXYZ100 is available as an open-loop (no position feedback) or closed-loop device with integrated position feedback. In open-loop, the resolution is only limited by the noise of the control electronics, but repeatability and stability are compromised due to the hysteresis and creep of the piezo ceramic material. The closed-loop systems (model numbers ending in SG) feature high resolution strain-gauge position sensors for highly accurate and repeatable motion. To avoid damage during fastening, excessive moment loads and side forces acting between the top plate and the housing should be avoided. Fastening is accomplished by a number of threads and alignment pin holes at the top and bottom plates. For mounting to optical tables or other components with the same hole grid, use adapter plate NPX-BP.