Piezo Rotary Stage

The Micronix Rotary Stage features a patent-pending multi-phase piezo motor which results in high speed and blocking force. The rotary stage can travel up to 30 degrees per second with unlimited travel. For high stability and smooth motion the stage features a pre-loaded steel ball bearing design. Newly redesigned piezo rotary stage has a compact design of 14 mm height. The stage can also include an integrated sensor for precise closed-loop operation. Resolution of 3.6 μ-degrees is possible in open-loop operation and with closed-loop operation the piezo rotary stage has a resolution of 5.0 μ-degrees with a repeatability of 200 μ-degrees. This high precision rotary stage is ideal for applications requiring precise rotational movement in microscopy, alignment, or other sensing applications. The motion stage can also be easily combined with other Mirconix stages to add linear motion in the x-y plane or z plane. Piezo rotary stage can also be configured for operation in a vacuum down to 10-9 mbar. This precision piezo rotary stage is offered by Micronix.